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发明名称
Inspection equipment
摘要
申请公布号
EP1061359(A3)
申请公布日期
2002.04.03
申请号
EP20000112308
申请日期
2000.06.08
申请人
SONY CORPORATION
发明人
EGUCHI, NAOYA
分类号
G01B11/24;G01B11/245;G01B11/30;G01M11/00;G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/956
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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