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发明名称
TUNNEL CONTACT AND METHOD FOR THE PRODUCTION THEREOF
摘要
申请公布号
EP1192667(A1)
申请公布日期
2002.04.03
申请号
EP20000952863
申请日期
2000.06.23
申请人
INFINEON TECHNOLOGIES AG
发明人
WINTERS, RAINER
分类号
H01L29/51;(IPC1-7):H01L29/51
主分类号
H01L29/51
代理机构
代理人
主权项
地址
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