发明名称 |
Lateral shift measurement using an optical technique |
摘要 |
Alignment of layers during manufacture of a multi-layer sample is controlled by applying optical measurements to a measurement site in the sample. The measurement site includes two diffractive structures located one above the other in two different layers, respectively. The optical measurements include at least two measurements with different polarization states of incident light, each measurement including illuminating the measurement site so as to illuminate one of the diffractive structures through the other. The diffraction properties of the measurement site are indicative of a lateral shift between the diffractive structures. The diffraction properties detected are analyzed for the different polarization states of the incident light to determine an existing lateral shift between the layers. |
申请公布号 |
AU9414901(A) |
申请公布日期 |
2002.04.02 |
申请号 |
AU20010094149 |
申请日期 |
2001.09.20 |
申请人 |
NOVA MEASURING INSTRUMENTS LTD. |
发明人 |
BOAZ BRILL;MOSHE FINAROV;DAVID SCHEINER |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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