CONTROLLING METHOD FOR OBJECT FLOATING DEVICE AND THE SAME DEVICE

摘要

PROBLEM TO BE SOLVED: To hold an object in a prescribed range without providing a guide and a regulating member when floating the object by using a plurality of vibrators. SOLUTION: This object floating device 1 is provided with the plurality of vibrators 2a to 2d and 3 formed into rectangular plate shapes. Each of the vibrators 2a to 2d and 3 is fastened to horns 5a and 5b. A vibrator 6 for exciting the vibrator 2a is connected with oscillators 12a to 12e. A control device 14 is provided with a CPU 15. Each vibrator 6 is equipped with an impedance detection means 16 for detecting impedance of each vibration system for vibrating each of the vibrators 2a to 2d and 3. The impedance detection means 16 is connected with the CPU 15. The CPU 15 judges whether an object 4 is deviated from the prescribed range or not based on a detection signal of the impedance detection means 16 and controls at least one of frequencies and voltage of the oscillators 12a to 12c so as to correct the deviation when the object 4 is deviated.