发明名称 Thin film transistor
摘要 In a thin film transistor (TFT), a gate electrode, a gate insulating film, a poly silicon film having a channel, a stopper insulating film on the channel, an interlayer insulating film, a source electrode and a drain electrode, a planarizating film, and a transparent electrode are formed on an insulating substrate in that order. In this TFT, either of the source electrode and the drain electrode or the transparent electrode is formed on the interlayer insulating film or the planarizating film spreading over the channel. This will restrain the occurrence of a back channel resulting from polarization in the planarizating film or the interlayer insulating film in the TFT caused by water or impurity ions, or variation of a threshold voltage of the TFT when a back channel occurs. As a result, TFTs and liquid crystal displays which have few defects and can perform display having uniform brightness all over can be provided.
申请公布号 US6365915(B1) 申请公布日期 2002.04.02
申请号 US19990274124 申请日期 1999.03.23
申请人 SANYO ELECTRIC CO., LTD. 发明人 HIRAI KYOKO;JINNO YUSHI
分类号 G09F9/30;G02F1/1343;G02F1/136;G02F1/1362;G02F1/1368;H01L21/336;H01L29/786;(IPC1-7):H01L29/04;G02F1/134 主分类号 G09F9/30
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