| 摘要 |
A resistor element according to the present invention comprises a resistive layer provided on a semiconductor substrate through a first insulating film, a first wiring layer provided on the resistive layer through a second insulating film, a second wiring layer provided on the first wiring layer through a third insulating film, a first contact region including a plurality of contacts and provided in the second insulating film and the third insulating film, for electrically connecting the resistive layer to the second wiring layer and a second contact region including a plurality of contacts and provided in the second insulating film, for electrically connecting the resistive layer to said first wiring layer. The contacts of the second contact region are arranged on and along a periphery of a polygonal shape having a center registered with a center point of the first contact region.
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