| 发明名称 |
CMP formulations |
| 摘要 |
CMP formulations comprising alumina particles and an iodate oxidizer can be stabilized against pH drift during use by acidification using an organic acid. Formulation pH stability can be further enhanced by treating the formulation at an elevated temperature before it is used.
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| 申请公布号 |
US6364920(B1) |
申请公布日期 |
2002.04.02 |
| 申请号 |
US20000553664 |
申请日期 |
2000.04.21 |
| 申请人 |
SAINT-GOBAIN CERAMICS & PLASTICS, INC. |
发明人 |
GARG AJAY K.;TANIKELLA BRAHMANANDAM V. |
| 分类号 |
C09G1/02;C09K3/14;(IPC1-7):C09K3/14;C09G1/04 |
主分类号 |
C09G1/02 |
| 代理机构 |
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