ARTICLE MADE OF SILICON SUBSTRATE AND BARRIER LAYER

摘要

PROBLEM TO BE SOLVED: To provide an article made of a silicon substrate and a barrier layer which inhibits generation of gaseous chemical species of silicon by preventing water from penetrating a silicon surface, and from oxidation of the surface, when the article is exposed to an aquatic environment of high temperatures. SOLUTION: The barrier layer for the silicon substrate includes an aluminosilicate of alkaline-earth metals and an additive which can react with silica to prevent a reaction of the free silica with the barrier layer.