| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for treating processing equipment, in which time necessary for a rise process is shortened and shortage of life of a device and parts such as a valve is controlled. SOLUTION: In a rise process 1 of a device having at least initial treatment 2 of a robot, treatment 3 of exhaust gas of a chamber and treatment 4 of both temperature rise of a heater and degassing, after each treatment 2-4 is completed, a flag 10 of treatment completion is set up. Thereafter, when an obstacle is generated while the device is operated, treatment of each treatment 2-4, in which the obstacle is generated, is completed and setting of the flag 10 is off. After removing the cause generating the obstacle, when the rise process 1 is executed again, each treatment 2-4, in which the flag 10 of treatment completion is not set up, is automatically executed and each treatment 2-4, in which the flag 10 of treatment completion is set up, is not automatically executed.
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