| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamper which dispenses with a special installation such as a dry etching device and cuts short the time required for manufacturing the stamper. SOLUTION: This method for manufacturing the stamper comprises the step to form a negative photoresist layer on one of the sides of a conductive substrate, the step to make the exposure of the negative photoresist layer with the help of a photomask, the step to heat the negative photoresist layer from the surface side, the step to develop the negative photoresist layer, the step to remove the resist residue and the oxide film of the unexposed part, the step to form an electrocasted element on the substrate and the step to remove the photoresist layer of the exposed part from the substrate.
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