发明名称 Production of silicon carbide bodies
摘要 A method for producing a silicon carbide body, includes the steps of forming a silicon carbide mass by chemical vapor deposition, and thermally treating the silicon carbide mass under vacuum or in an inert gas atmosphere at a temperature not less than 2000° C., the silicon carbide article having an electric resistivity higher than that of the silicon carbide mass having not been thermally treated.
申请公布号 US6365460(B1) 申请公布日期 2002.04.02
申请号 US19990460018 申请日期 1999.12.13
申请人 NGK INSULATORS, LTD. 发明人 YAMADA HIROTAKE;MURAI MAKOTO;FURUKUBO HIROSHI;AIHARA YASUFUMI;OHASHI TSUNEAKI
分类号 C23C16/32;C23C16/56;(IPC1-7):H01L21/00;H01L21/369 主分类号 C23C16/32
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