| 摘要 |
PURPOSE:To improve the corrosion resistance by converting the oxygen content in AlN powder subjected to the oxidation treatment into Al2O3, mixing the AlN powder with a Ca compound and a Y compound so as to provide a specific molar ratio expressed in terms of oxides and sintering the resultant mixture. CONSTITUTION:AlN powder subjected to the oxidation treatment is mixed with a Ca compound such as CaCO3 and a Y compound such as Y2O3 as a sintering assistant in the total amount of 0.5-10wt.% expressed in terms of oxides and the oxygen content in the AlN powder is converted into Al2O3 so as to provide 25<=CaO<=55, 10<=Y2O3<=20 and 35<=Al2O3<=65 expressed in terms of molar ratios. An adequate amount of a binder is then added to the resultant mixture. Granulating and press forming are carried out to heat the formed compact in an N2 gas atmosphere. Thereby, the binder is removed. The heated compact is then placed in a container made of BN and sintered at about 1600 deg.C under ordinary pressure in an N2 gas atmosphere for 2-8hr to afford the objective AlN sintered compact having high thermal conductivity and excellent corrosion resistance. |
