发明名称 Method for singling semiconductor components and semiconductor component singling device
摘要 Semiconductor components, which each include at least one semiconductor chip mounted on a common carrier substrate, are singled. The separation is effected by severing of the carrier substrate. The carrier substrate is thereby bent at least in that area of the carrier substrate which is to be severed. The severing takes place beginning from the convexly curved surface of the carrier substrate. In addition, the invention describes a singling device for separating semiconductor components.
申请公布号 US6364751(B1) 申请公布日期 2002.04.02
申请号 US20000546421 申请日期 2000.04.10
申请人 INFINEON TECHNOLOGIES AG 发明人 POHL JENS;WUTZ OLIVER;WINDERL JOHANN
分类号 H01L21/78;(IPC1-7):B28D1/04 主分类号 H01L21/78
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