发明名称 |
Method of making non-planar micro-optical structures |
摘要 |
In one embodiment, the present invention provides a microlens having very small focal length. The present invention also provides a non-planar microstructure having a covering layer which is slowly oxidizing or substantially free of oxygen. The present invention also provides methods for forming such microlenses and microstructures. In addition, the present invention provides a VCSEL which includes one or more non-planar microstructures of the present invention.
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申请公布号 |
US6365237(B1) |
申请公布日期 |
2002.04.02 |
申请号 |
US20000624195 |
申请日期 |
2000.07.24 |
申请人 |
UNIVERSITY OF NEW MEXICO |
发明人 |
PEAKE GREGORY M.;HERSEE STEPHEN D.;SARANGAN ANDREW M. |
分类号 |
B29D11/00;C23C16/04;G02B3/00;G02B6/12;G02B6/124;H01L31/0232;H01S3/00;H01S5/026;H01S5/10;H01S5/183;(IPC1-7):C23C8/00 |
主分类号 |
B29D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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