发明名称 |
Method of inspecting a depth of an opening of a dielectric material layer |
摘要 |
For determining the quality of an opening formed in a dielectric material layer, a voltage contrast inspection tool is used to produce a voltage contrast image of a test pattern formed in the dielectric material layer. The voltage contrast values of openings may be compared to a reference contrast value or to different openings so as to decide whether or not the opening has a required depth.
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申请公布号 |
US6365423(B1) |
申请公布日期 |
2002.04.02 |
申请号 |
US20010921121 |
申请日期 |
2001.08.02 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
HEINLEIN FRANK;SULZER GEORG |
分类号 |
G01R31/265;H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
G01R31/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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