发明名称 |
Method and device for treating items stored in containers and storage apparatus equipped with such a device |
摘要 |
This device for treating items stored in at least one container (12), comprises means (14) for supplying the containers with a treatment gas and means (16) for continuously purging the containers, the supply means being equipped with means (22) for regulating the pressure of the treatment gas upstream of the containers. The purging means comprise a gas ejector (28) connected to the outlet of the containers (12) and supplied with a drive gas so as to regulate the pressure of the treatment gas downstream of the containers (12) and thus control the flow rate of the treatment gas therein.
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申请公布号 |
US6363626(B1) |
申请公布日期 |
2002.04.02 |
申请号 |
US20000533695 |
申请日期 |
2000.03.23 |
申请人 |
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
FIORILLO DENIS;JURCIK BENJAMIN;CHARLES SéBASTIEN |
分类号 |
C30B25/14;H01L21/673;(IPC1-7):F26B21/12 |
主分类号 |
C30B25/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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