| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for automatically detecting and sorting a wafer fault sign for avoiding human errors involved through manual confirmation of a wafer map, thus saving the time taken for a yield analysis engineer to classifying wafer fault signs. SOLUTION: The means, which includes a formation 20 of a fault sign database and a comparison 22 by an automatic comparison device, automatically sorts an inspected result according to the types of fault signs in the database. The means further outputs the inspected result to an analyzer for analysis 27, to further improve the product yield.
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