| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for grasping the housing state of a substrate in a substrate-housing vessel, related to a drive for opening/closing a lid of the substrate-housing vessel. SOLUTION: A cassette driving mechanism 4 reciprocates toward a diaphragm 12a (Y-direction). At the opening of a passage opening 12a of the diaphragm 12, a cassette 1 is driven to proceed toward the diaphragm 12 by the cassette driving mechanism 4, and the a shutter member 5 for stopping the passage opening 12a is driven to recede for opening the passage opening 12a. In housing a substrate W in the cassette 1, the shutter member 5 stops and closes the passages opening 12a, and then the cassette driving mechanism 4 drives the cassette 1 to recede. Meanwhile, a reflection type sensor 10 is fitted to the shutter member 5. The reflection type sensor 10, which falls integrally with the shutter member 5, sequentially detects substrates W in the cassette 1 for grasping the condition of the substrates W in the cassette 1. |
