SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To improve the quality and yield of the product manufactured by a semiconductor manufacturing apparatus by preventing substrates to be treated from being contaminated with organic matters which exist in the apparatus. SOLUTION: In the semiconductor manufacturing device in the enclosure 1, of which clean air flows A and B are formed, a member containing the organic matters is housed in a housing box 26, and the air inside the box 26 is discharged from the box 26 to the outside via an exhaust duct 31.