发明名称 LIFT PIN AND STAGE DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To prevent a semiconductor wafer from being scarred or damaged, without affecting inspection processes, even if the semiconductor wafer interferes at its delivery. SOLUTION: A lift pin 10 comprises a cylindrical pin body 13 and a pin tip piece 14, placed on the tip of the pin body 13.</p>
申请公布号 JP2002093890(A) 申请公布日期 2002.03.29
申请号 JP20000284324 申请日期 2000.09.19
申请人 OLYMPUS OPTICAL CO LTD 发明人 TSUJI HARUYUKI
分类号 H01L21/683;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
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