发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To avoid contact failures caused by chips, without impairing effective utilization of water or increasing cost. SOLUTION: Marks or patterns, required for manufacturing wafer, are arranged along both sides of dicing region on a wafer. Internal terminals 3 of the chip body are arranged outside of an alignment line of these marks or patterns. Dividing the dicing region into a plurality of chips, by cutting the dicing region in a central part between marks or patterns arranged in two lines in once time with a blade will not cause chips, including metal layer of marks or patterns. This can avoid contact failure caused by chips instead of increasing cost. Since the marks or patterns are arranged in the region with anticipation of cracks caused by the cutting, effective utilization of wafer is not diminished.
申请公布号 JP2002093750(A) 申请公布日期 2002.03.29
申请号 JP20000278736 申请日期 2000.09.13
申请人 TOSHIBA MICROELECTRONICS CORP;TOSHIBA CORP 发明人 TSUCHIYA IKUO
分类号 H01L21/027;H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/027
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