| 摘要 |
PROBLEM TO BE SOLVED: To provide a sealing mechanism in a treatment system arranged to enhance the sealing performance and to prolong the lifetime. SOLUTION: In a treatment system where an article is treated by touching a treatment fluid to an article to be treated under a state where a holding means holding the article is contained in an inner tubular body 25 (treated chamber 23) and sealed hermetically by the inner tubular body 25 or a first fixed wall 34, any one of the inner tubular body 25 or the first fixed wall 34 is provided, at the closing part thereof, with flexible hollow packings 100 and 101 in double. The hollow section 102 of each hollow packing 100, 101 is coupled with a pressurized air supply 103 through a pressure detecting switch 110 and an on/off valve 105 and switching is made between sealed state and nonsealed state by stretching/shrinking the hollow packings 100 and 101.
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