HYBRID ATTACH MIRRORS FOR A MEMS OPTICAL SWITCH

摘要

Disclosed is a method of manufacturing an array of m x n array of parallel flat mirrors and a method of assembling the array of mirrors to an m x n array of actuators to form a MEMS optical switch. The mirrors are formed form a single wafer of <110> silicon which is attached to a second silicon wafer by an adhesive layer of silicon dioxide. A two step etching process is used to form the mirrors. The first etching process is a wet etch which forms a series of parallel columns in the <110> silicon wafer with parallel side walls formed from the <111> crystalline planes of the wafer. The second etching divides the columns into an array of m x n columnar mirrors each having two parallel flat side walls formed from the <111> crystalline planes. The mirrors are then coated with a metallic reflective material such that at least one of the flat surfaces is coated to form a reflective surface. If desired, the array of mirrors can be attached to an m x n array of actuators. The array of mirrors is positioned above the array of actuators such that each mirror is positioned in a predetermined orientation relative to an actuator. The mirrors are then brought into contact with the actuators and bonded to the actuators. The mirrors are then released from the second silicon wafer by etching the layer of silicon dioxide such that the mirrors can move relative to each other.