发明名称 |
METHOD AND SYSTEM FOR REMOVAL PROCESSING |
摘要 |
PROBLEM TO BE SOLVED: To provide a processing method and cleaning equipment performing selective removal at a region on a work without using any mask in which cleaning work is not required after processing and environmental influence is suppressed. SOLUTION: Removal processing is performed by jetting supercritical fluid from a machining nozzle 8 to the work 9 thereby corroding the work 9.
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申请公布号 |
JP2002093771(A) |
申请公布日期 |
2002.03.29 |
申请号 |
JP20000283009 |
申请日期 |
2000.09.19 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
MURO SHINKO;TAKAHASHI MASAYUKI;MORITA KIYOYUKI |
分类号 |
H01L21/306;(IPC1-7):H01L21/306 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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