发明名称 METHOD AND SYSTEM FOR REMOVAL PROCESSING
摘要 PROBLEM TO BE SOLVED: To provide a processing method and cleaning equipment performing selective removal at a region on a work without using any mask in which cleaning work is not required after processing and environmental influence is suppressed. SOLUTION: Removal processing is performed by jetting supercritical fluid from a machining nozzle 8 to the work 9 thereby corroding the work 9.
申请公布号 JP2002093771(A) 申请公布日期 2002.03.29
申请号 JP20000283009 申请日期 2000.09.19
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MURO SHINKO;TAKAHASHI MASAYUKI;MORITA KIYOYUKI
分类号 H01L21/306;(IPC1-7):H01L21/306 主分类号 H01L21/306
代理机构 代理人
主权项
地址