CERAMIC HEATER FOR PRODUCING/INSPECTING SYSTEM OF SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a ceramic heater for producing/inspecting system of semiconductor having an excellent uniformity of temperature by using a ceramic material having a high thermal conductivity in the heater substrate. SOLUTION: A disc-like ceramic heater 100 is arranged such that a heater pattern 2 formed on the surface of a ceramic substrate 1 or in the ceramic substrate 1 while describing an R has a substantially constant width. A ceramic nitride (e.g. aluminum nitride) is employed as the material of the ceramic substrate 1 and conductive ceramic particles (carbide of tungsten or molybdenum) is employed as the material of the heater pattern 2. The ceramic substrate 1 is shaped to have a diameter of 200 mm or above and the heater pattern 2 is shaped substantially into an arc having a radius of curvature from 0.1 to 20 mm.