| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device which has a large movement quantity and is easy to repair. SOLUTION: This stage device limits the movement of a moving body to and away from a base and has leaf springs, a plate-type member, and a leaf spring connecting member. The plate-type member is provided with a positioning means which engages the base, moving body, or leaf spring connecting member. The plate-type member is welded or brazed to both the ends of the leaf springs; and the two leaf springs are arranged and fixed almost at right angles across the leaf spring connecting members; four leaf spring connecting members are arranged around the moving body; and one of the two leaf springs fixed to the leaf spring connecting members is fixed to the base, while the other is fixed to the moving body. |
