SEMICONDUCTOR STORAGE DEVICE AND ITS INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To decrease the frequency of proving in an inspection stage and to select redundancy substitution errors as to expected values '0' and '1'. SOLUTION: A redundancy substitution address data are written to a standby cell (3) before a redundancy substitution and the fuse of a redundant fuse circuit (22) is cut according to the redundancy substitution address; and then after the redundancy substitution redundancy substitution address data stored in the redundancy fuse circuit and the redundancy substitution address data written to the standby cell are read out to a tester and compared with each other by the tester to inspect a redundancy substitution error.