摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron emitting negative electrode having a low emission starting voltage suitable for FED(Field Emission Display). SOLUTION: Super-fine diamond grain 2 with an average diameter of, for example, some 10 nm-some 100 nm is applied on a silicon substrate 1, and a complex carbon film 4 comprising a carbon film 6 with sp3 bonding laminated on a carbon film 5 with sp2 bonding is formed by cathode arc method. Practically, by the complex carbon film 4 with very low work function, the electron emission property is improved and the emission starting voltage is lowered.</p> |