METHOD FOR MANUFACTURING THIN FILM MAGNETIC HEAD, METHOD FOR INSPECTING THIN FILM MAGNETIC HEAD AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for optically and efficiently measuring positions of plural thin film magnetic head elements formed on a bar in a row at high speed and with high precision and to feed the measured result back to a manufacturing stage to stabilize the manufacturing process of the thin film magnetic head element. SOLUTION: A positional estimation value of a sample in the bar is obtained from the positional deviation between the element and the next element and the distance between them by estimating the value using a primary approximate straight line or a several order approximate curve and the element simultaneously moves by the estimation value and the distance between them. The stage for measuring the dimension has a stage for photoelectrically transforming an image formed in a lens optical system to an image signal and a stage for calculating the dimension. The transformation to the image signal is performed directly after the next element moves and continuously repeated and the stage for calculation is processed parallel to the stage for transferring to the image signal. Thus, highly precise, highly stable and high resolution image measurement is made possible and highly precise measurement of the narrow track width of a GMR head is made possible. A high yield in the manufacturing stage can be maintained by feeding the measured result back to the manufacturing stage.