| 摘要 |
PROBLEM TO BE SOLVED: To enhance the recognition execution accuracy of a recognition processing means. SOLUTION: An image picked up by means of a substrate recognition camera 12 is stored in an image memory 34 and a CPU 31 executes recognition processing. The image thus picked up, template image information stored in an RAM 32 and actual image information are subjected to pattern matching. If the coincidence parameter is not lower than 90%, execution results are 'OK' and the coordinate is determined and the actual position of a positioning mark 13 (corresponding to mark 1) is recognized. Subsequently, data for judging the shape of the mark is extracted (image information extraction) from a mark image 50 thus picked up and its shape, size, and the like, are stored in the RAM 32 as the actual image information of a pattern to be recognized. The template image information stored in the RAM 32 is merged with the actual image information of the pattern to be recognized to generate new template image information which is used for subsequent recognition. |
