| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrier in which interference with other apparatus can be prevented surely regardless of the size or the orientation in the X-Y plane of a stage. SOLUTION: When a substrate 10 to be carried is mounted on a stage 11 in a substrate carrier, a controller 13 controls a stage drive mechanism 12 to move the substrate mounted on the stage 11 to the compression position of electronic component. The controller 13 compares a limit value set in a register 13a with the coordinate at the target position of the stage 11 and controls the stage drive mechanism 12 if the target position does not exceed the limit value otherwise stops control of the stage drive mechanism 12. Based on the detection results from a stage angle detecting section 15 and a stage size detecting section 16 and a content stored in a storage unit 14, the controller 13 switches the limit value depending on the extending state in the X-Y plane of the stage 11 (orientation in the X-Y plane of the stage 11 and size in the X-Y plane of a stage 11 being fixed currently). |
