| 摘要 |
PROBLEM TO BE SOLVED: To improve the cooling efficiency of the heat that is generated in the target layer 12. SOLUTION: A thermal diffusion layer 11 is formed between the base plate 10 and the target layer 12, and the heat that is generated in the target layer by the crashing of electron is diffused and conducted by the thermal diffusion layer 11. As the heat that is generated at the local spot of the target layer 12 by the irradiation of the electron of a minute area (focal point) is also diffused by the thermal diffusion layer 11 and there is no heat remaining in a part of the base plate 10, and so rapid cooling is possible. It is desirable to construct the thermal diffusion layer 11 by a super hard material having at least a higher heat conductivity than the metal material forming the base plate, or by a thermal diffusion material containing a super hard material of a granular shape or powder shape having at least a higher heat conductivity than the metal material forming the base plate.
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