发明名称 |
METHOD OF MANUFACTURING ELECTRONIC DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an electronic device which manufactures a conductive oxide film which is further superior in characteristics. SOLUTION: The electronic device manufacturing method comprises a step (a) of forming a compound conductor film on a base and a step (b) of treating the compound conductor film in a liquid phase for adjusting the composition of at least the surface. |
申请公布号 |
JP2002094018(A) |
申请公布日期 |
2002.03.29 |
申请号 |
JP20000279819 |
申请日期 |
2000.09.14 |
申请人 |
FUJITSU LTD |
发明人 |
CROSS JEFFREY SCOTT;TSUKADA MINEHARU |
分类号 |
H01L21/316;H01L21/203;H01L21/8242;H01L21/8246;H01L27/105;H01L27/108 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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