发明名称 METHOD OF MANUFACTURING ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing an electronic device which manufactures a conductive oxide film which is further superior in characteristics. SOLUTION: The electronic device manufacturing method comprises a step (a) of forming a compound conductor film on a base and a step (b) of treating the compound conductor film in a liquid phase for adjusting the composition of at least the surface.
申请公布号 JP2002094018(A) 申请公布日期 2002.03.29
申请号 JP20000279819 申请日期 2000.09.14
申请人 FUJITSU LTD 发明人 CROSS JEFFREY SCOTT;TSUKADA MINEHARU
分类号 H01L21/316;H01L21/203;H01L21/8242;H01L21/8246;H01L27/105;H01L27/108 主分类号 H01L21/316
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