APPARATUS AND METHOD FOR DETECTING VIBRATION OF WAFER TRANSFERRING APPARATUS

摘要

PURPOSE: An apparatus for detecting vibration of a wafer transferring apparatus is provided to prevent a temporary malfunction caused by friction generated by a repeated transfer process or to prevent tweezers clamping a wafer from colliding against a wall, by detecting fine vibration. CONSTITUTION: The wafer transfer apparatus(50) horizontally and vertically rotates, driven by a drive apparatus. A vibration detecting apparatus(60) detects the vibration of the wafer transfer apparatus. A vibration signal control apparatus determines and controls a degree of a vibration signal. A central processing unit indicates whether the drive apparatus is driven according to the result determined by the vibration signal control apparatus.