发明名称 |
Integrated optic device manfacture by cyclically annealed proton exchange process |
摘要 |
A method of manufacturing an integrated optic device having at least one waveguide formed in a surfaced thereof is described. The waveguide is formed utilizing a two-step proton exchange process in which the substrate is bathed in a strong acid and then subjected to a plurality of annealing cycles.
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申请公布号 |
US2002035856(A1) |
申请公布日期 |
2002.03.28 |
申请号 |
US20010777000 |
申请日期 |
2001.02.05 |
申请人 |
MICRO PHOTONIX INTEGRATION CORPORATION |
发明人 |
HUNG HENRY |
分类号 |
G02B6/134;G02F1/035;(IPC1-7):G02B6/13 |
主分类号 |
G02B6/134 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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