Verfahren zur Fernmessung von Prozessmesswerten,申请号DE1994628086T-传众专利搜索

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发明名称	Verfahren zur Fernmessung von Prozessmesswerten
摘要
申请公布号	DE69428086(T2)	申请公布日期	2002.03.28
申请号	DE1994628086T	申请日期	1994.09.15
申请人	NCR INTERNATIONAL, INC.;HYUNDAI ELECTRONICS AMERICA, MILPITAS;SYMBIOS, INC.	发明人	YAKURA, JAMES P.;COLE, RICHARD K.;VON THUN, MATTHEW S.;HASS, CRYSTAL J.;ALLMAN, DERRYL D. J.
分类号	H01L21/66;G01K1/02;G01K7/00;H01L21/00;(IPC1-7):G01K1/02	主分类号	H01L21/66
代理机构		代理人
主权项
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