| 摘要 |
An electrostatic actuator includes first and second electrode portions disposed at predetermined intervals, each electrode portion including one or more series of electrodes arranged successively in a predetermined direction; a slider disposed between the first and second electrode portions and having electrode portions at side faces opposed to the first and second electrode portions, the slider being movable in the predetermined direction; an electrostatic capacitance detecting circuit configured to detect electrostatic capacitances between each series of electrodes of the first and second electrode portions and the electrode portions of the slider; and a driving circuit configured to drive the slider in the predetermined direction by applying voltages between selected series of electrodes of one of the first and second electrode portions and the electrode portions of the slider, said selected series of electrodes being selected based on a detected result of the electrostatic capacitance detecting circuit.
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