发明名称 |
Kalibrierungsnorm für einen Profilometer und Verfahren zu seiner Produktion |
摘要 |
To allow faithfully the quantitative interpretation of the measuring results obtained by scanning force microscopes (STM) or atomic force microscopes (AFM) the probe tips used have to be exactly characterized before and after measuring since their size and shape may change during the measuring procedure. If the tips are cone-shaped, their diameter and their cone angle have to be known accurately. Described are calibration standards for profilometers, especially for STMs and AFMs, which are of high accuracy and which allow calibration measurements without frequently removing the probe tips. Methods of producing these calibration standards are shown and examples are given for the use of the calibration standards for measuring features in the sub-nanometer range or for calibrating profilometers. <IMAGE> |
申请公布号 |
DE69427522(T2) |
申请公布日期 |
2002.03.28 |
申请号 |
DE1994627522T |
申请日期 |
1994.04.11 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK |
发明人 |
BAYER, THOMAS;GRESCHNER, DR.;MARTIN, YVES;MEISSNER, KLAUS;WEISS, HELGA |
分类号 |
G01N1/00;G01B1/00;G01B7/34;G01N27/00;G01N37/00;G01Q40/02;H01L21/20 |
主分类号 |
G01N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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