发明名称 |
LOCAL INTERCONNECT STRUCTURES AND METHODS |
摘要 |
An integrated circuit comprising a field effect transistor gate self aligned to its respective moat in conjunction with a local interconnect structure. The spacing between two adjacent transistors with collinear gate alignments is minimized.
|
申请公布号 |
US2002036347(A1) |
申请公布日期 |
2002.03.28 |
申请号 |
US19990428835 |
申请日期 |
1999.10.28 |
申请人 |
HOUSTON THEODORE W |
发明人 |
HOUSTON THEODORE W |
分类号 |
H01L21/762;H01L21/8234;(IPC1-7):H01L29/40;H01L23/48;H01L23/52 |
主分类号 |
H01L21/762 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|