发明名称 |
LOW-LOSS WAVEGUIDE AND METHOD OF MAKING SAME |
摘要 |
A method of reducing the scattering losses that involves smoothing of the core/cladding interface and/or change of waveguide geometry in high refractive index difference waveguides. As an example, the SOI-based Si/SiO>2< waveguides are subjected to an oxidation reaction at high temperatures, after the waveguide patterning process. By oxidizing the rough silicon core surfaces after the patterning process, the core/cladding interfaces are smoothened, reducing the roughness scattering in waveguides. |
申请公布号 |
WO0225337(A2) |
申请公布日期 |
2002.03.28 |
申请号 |
WO2001US41632 |
申请日期 |
2001.08.08 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
LEE, KEVIN, K.;LIM, DESMOND;WADA, KAZUMI;KIMERLING, LIONEL, C. |
分类号 |
G02B6/12;G02B6/122;G02B6/13;G02B6/132 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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