摘要 |
An optical device has a supporting substrate including at least a surface layer and an etching stopper layer. The surface layer is etched to create a window in which the etching stopper layer or a lower supporting layer is exposed. An optical substrate, in which a lens element is formed, is mounted upright on the exposed floor of the etched window. Another optical element such as an optical fiber, a laser diode, or a photodiode is mounted on the surface layer. This optical element is easily aligned with the lens element by passive methods, by aligning the optical element and optical substrate in relation to marks on the upper surface of the supporting substrate, for example, or in relation to the sides of the window. Vertical alignment is automatically controlled by the thickness of the etched layers.
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