发明名称 |
FREESTANDING POLYMER MEMS STRUCTURES WITH ANTI STICTION |
摘要 |
An anti stiction structure for cantilever formation technique. In one embodiment, the cantilever (130) includes downwardly extending plurality of legs (131 and 132) which preventing the substrate (100) from sticking to the cantilever. In another embodiment, the polymer cantilever (215) is prevented from sticking to the substrate (200) by at amortized stick layer (205) on the substrate and during the formation of the cantilever, the stick layer is removed later as a sacrificial layer.
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申请公布号 |
WO0224466(A1) |
申请公布日期 |
2002.03.28 |
申请号 |
WO2001US30243 |
申请日期 |
2001.09.25 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY;TAI, YU, CHONG;YAO, TZE-JUNG;YANG, XING |
发明人 |
TAI, YU, CHONG;YAO, TZE-JUNG;YANG, XING |
分类号 |
B81B3/00;B81C1/00;(IPC1-7):B44C1/22;B41J2/04;A61B19/00;H01L21/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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地址 |
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