| 摘要 |
An apparatus (10) for measuring surface particulate contamination includes a tool (12,112) for collecting a contamination sample from a target surface, a mask (16) having an opening (28) of known area formed therein for defining the target surface, and a flexible connector (18) connecting the tool (12,112) to the mask (16). The tool (12,112) includes a body portion (13,113) having a large diameter section (20,120) defining a surface (22,122) and a small diameter section (24,124) extending from the large diameter section (20,120). A particulate collector (14) is removably mounted on the surface (22,122) of the large diameter section (20,120) for collecting the contaminants. The tool (12,112) further includes a spindle (30) extending from the small diameter section (24,124) and a spool (32) slidingly mounted on the spindle (30). A spring (34) is disposed between the small diameter section (24,124) and the spool (32) for biasing the spool (32) away from the small diameter section (24,124). An indicator (36) is provided on the spindle (30) so as to be revealed when the spool (32) is pressed downward to compress the spring (34). <IMAGE> <IMAGE>
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