| 摘要 |
PROBLEM TO BE SOLVED: To provide an endless track translating/turning stage having a high positioning accuracy in which frictional force is employed in place of inertial force. SOLUTION: The endless track translating/turning stage comprises three steel balls 2, 3 and 4 held by two multilayer piezoelectric elements x1, y1, x2, y2, x3 and y3 intersecting perpendicularly, a magnet 5 placed in the central part of the stage 7, and a sample stage 1 being supported by the three steel balls 2, 3 and 4 wherein the sample stage 1 is driven only with frictional force by vibrating the three steel balls 2, 3 and 4 repeatedly at a specified timing in a specified direction. |
