发明名称 METHOD AND APPARATUS FOR BURN-IN AGING
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus, for a burn-in aging test, wherein the amount of a loss is reduced when defective are dumped, an installation space and a human operation are reduced and the burn-in aging test can be performed with good efficiency. SOLUTION: The burn-in aging apparatus is provided with a rotating base 120 which makes a round in several tens of minutes, a mounting means which is composed of many burn-in bases arranged in the peripheral edge of the rotating base, in which a heating means is built and by which semiconductor laser chips from a preporcess before executing at least an armor are mounted sequentially on the burn-in bases in a prescribed receiving place 181, a burn-in means by which the laser chips on the burn-in bases being moved on the circumference are burn-in, light receiving parts 151 to 155 which are arranged in several places in the circumference of the rotating base and a discharge means by which the laser chips are discharged sequentially from the burn-in bases in a discharge place 182 having made about one round from the receiving place. While the laser chips which have been received sequentially from the preprocess are being mounted on the burn-in bases up to the discharge place from the receiving place so as to be conveyed, the burn-in bases are heated, the laser chips are burn-in and aged at a high temperature, and only nondefectives are sorted on the basis of measured results in the light receiving parts so as to be delivered to a next process.
申请公布号 JP2002090415(A) 申请公布日期 2002.03.27
申请号 JP20000277438 申请日期 2000.09.13
申请人 NOOZERU ENGINEERING KK 发明人 IKEDA KENJI
分类号 G01R31/26;H01L21/66;H01S5/00;(IPC1-7):G01R31/26 主分类号 G01R31/26
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