摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a porous static pressure gas bearing capable of easily achieving proper and stable air permeability, while at the same time removing chips and abrasives embedded in pores. SOLUTION: The method of manufacturing a porous static pressure gas bearing while adjusting the air permeability of a porous sintered metallic body 1 includes the step of mixing metallic powders with inorganic powders and sintering them to prepare the porous sintered metallic body 1, the step of grinding one side of the sintered metallic body 1 to form a bearing surface 2, and the step of immersing the metallic body 1 with the bearing surface 2 formed thereon into an ultrasonically vibrated liquid 22 to increase the areas of the openings 12 of pores 11 in the bearing surface 2 of the sintered metallic body 1.
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