MEMBRANE TYPE PROBE DEVICE, HIGH PURITY TUNGSTEN MICRO BALL USED FOR IT, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a high purity tungsten micro ball rationalized in polishing method without damaging the accuracy and causing breakage, and to provide the high purity tungsten micro ball manufactured by this manufacturing method, and a probe using this micro probe. SOLUTION: The membrane type probe 30 used for inspecting semiconductor device has such a constitution that plural electrodes 11 are arranged on a board 20 of the semiconductor device, and is composed of a membrane member 26 and the elastically deformable tungsten micro ball forming globular projections 25 of a contact pad 21 installed on the membrane member 26, directly contactable with the electrodes 11 on the board.