摘要 |
PROBLEM TO BE SOLVED: To provide a lens-adjusting device with which dust or the like is prevented from adhering to a diffraction grating, and a lens-adjusting method utilizing such a device. SOLUTION: This lens-adjusting device 10 is provided with a diffraction device 22 diffracting the light transmitted through a lens 12 to zero-th order diffracted light and first-order diffracted light differently and making the diffracted light interfere, a moving device 36 for moving the device 22, and an aberration measuring device 44 for obtaining the aberration of the lens from the interference image by the zero-th order diffracted light and the first- order diffracted light. Then, the device 22 is equipped with the diffraction grating 24, having a diffraction surface 26 where plural grooves 28 are formed, a conductive film 30 covering over the diffraction surface, in a state where a recessed part 60 corresponding to a groove is left and an electrical wire 32 which grounds the conductive film to ground.
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