发明名称 LENS-ADJUSTING DEVICE AND LENS-ADJUSTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a lens-adjusting device with which dust or the like is prevented from adhering to a diffraction grating, and a lens-adjusting method utilizing such a device. SOLUTION: This lens-adjusting device 10 is provided with a diffraction device 22 diffracting the light transmitted through a lens 12 to zero-th order diffracted light and first-order diffracted light differently and making the diffracted light interfere, a moving device 36 for moving the device 22, and an aberration measuring device 44 for obtaining the aberration of the lens from the interference image by the zero-th order diffracted light and the first- order diffracted light. Then, the device 22 is equipped with the diffraction grating 24, having a diffraction surface 26 where plural grooves 28 are formed, a conductive film 30 covering over the diffraction surface, in a state where a recessed part 60 corresponding to a groove is left and an electrical wire 32 which grounds the conductive film to ground.
申请公布号 JP2002090605(A) 申请公布日期 2002.03.27
申请号 JP20000280249 申请日期 2000.09.14
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 FUKUI KOJI;TAKADA KAZUMASA
分类号 G01M11/02;G02B5/18;G02B7/02;G11B7/08;G11B7/22;(IPC1-7):G02B7/02 主分类号 G01M11/02
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