| 摘要 |
PURPOSE: Optical element deformation system is provided, which is related to an optical element deformation system in an imaging device for the purpose of eliminating image errors or for active adjustment. CONSTITUTION: In accordance with FIG. 1, a mirror(1)is provided with piezoelectric elements(3) on its rear(2) as surface to be deformed. Two piezoelectric elements(3), which form the shape of a cross, are provided in accordance with the illustration. Capacitive ranging sensors(4) at a short distance from the rear(2) are provided in order to detect the state of deformation. The piezoelectric elements(3) are piezoelectric ceramic films (PZT films) which are integrated in the mirror material or bonded onto the rear(2), and which can, for example, have a thickness of a few mum. When the PZT films are being driven, they experience in accordance with the piezoelectric effect a strain which impresses forces on the mirror via the connection with the mirror substrate, and this leads to deformation of the mirror. Multifarious "patterns" are conceivable for generating any desired states of deformation in any desired angular orientation. As a rule, the piezoelectric elements will be provided for low corrugations, although these are not, of course, restrictive.
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