发明名称 METHOD AND DEVICE FOR GROWING RIBBON CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method of pulling a ribbon crystal, by which a ribbon- like silicon single crystal or the like can be produced at a low cost without depending on the experience of a worker, and to provide a device for pulling the ribbon crystal. SOLUTION: A seed crystal 1 is allowed to descent, and the contact of the seed crystal with a free melt 3 is detected by an image of an image pick-up device 31. Then, the temperature of the free melt 3 is controlled so that the meniscus 39 at the contact part of the seed crystal with the free melt 3 can be kept, and the temperature of the free melt 3 is lowered so as to form a wing-out 41. Further, the length and the symmetric property of the wing-out 41 is detected by the image of the image pick-up device 31, and thereafter, pulling of a crystal is started.
申请公布号 JP2002087899(A) 申请公布日期 2002.03.27
申请号 JP20000275315 申请日期 2000.09.11
申请人 EBARA CORP 发明人 TERAO KENJI;ISOZAKI HIDEYUKI;TAKAHASHI TARO;NIIJIMA MOTOHIRO
分类号 C30B15/00;C30B15/26;C30B29/06;(IPC1-7):C30B15/26 主分类号 C30B15/00
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